CEM-System
Liquid Delivery System with Vapour Control

General

The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapour generation system consists of a liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 0,25-1200 g/h resulting in saturated vapour flows of 50 ml_n/min up to 100 l_n/min. This vaporizer system can replace bubblers.

New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.

The evaporation system is fast, accurate, highly repeatable and efficient.

Features                                             

       Accurately controlled gas/liquid mixture

       (mass flow)

       Fast response

       High reproducibility

       Handles water, solvents, liquid mixtures

       Very stable vapour flow

       Flexible selection of gas/liquid ratio

       Lower working temperature than conventional system

Applications

       CVD (Chemical Vapour Deposition), e.g. for hardening, thin film coating or planarization processes

       Testing/calibration of analyzers with reference gas vapor concentrations

       Toxic gas effects on protective clothing

       Analyzers with reference H₂O vapour concentrations

       Humidification of fuels

       Anaesthetics